Coherent Innova 300 FreD Deep UV Source

 

In applications requiring deep-UV, the qualities of the output beam are of the utmost importance. FreD lasers exhibit exceptional spatial and temporal coherence, wavelength stability, and output power stability. These factors make the FreD system the ideal laser for exacting applications requiring precise process control.

FreD systems combine an extremely stable continuous SuperInvar resonator with performance-enhancing active stabilization components such as PowerTrack, ModeTrack, and ModeTune. These features ensure the highest performance over extended time periods. Each FreD system utilizes the Series V plasma tube, which delivers the longest lifetime and cost-effective operation. Push-button remote operation is standard, with Sabre MotoFreD's "Search-And-Tune" function also offering automatic fundamental wavelength selection and peaking.

Innova FreD Key Features:

Innova FreD Key Power Specifications (All Powers in Watts)

 

(nm)

90C FreD

300C FreD/MotoFreD

300C FreD/MotoFreD High Power

 Sabre MotoFreD

264.3

0.02

0.02

0.02

0.10

257.2

0.10

0.10

0.20

1.00

250.8

0.015

0.015

0.03

-

248.2

0.06

0.06

0.075

0.30

244.0

0.10

0.10

0.125

0.50

238.2

0.03

0.03

0.04

0.10

229.0

0.01

0.01

0.015

0.04

351.1

-

0.14

0.14

1.0

363.8

-

0.14

0.14

1.0

ML UV

0.40

0.40

0.40

3.0

457.9

0.35

0.35

0.35

1.2

476.5

0.60

0.60

0.60

2.0

488.0

1.50

1.50

1.50

6.5

496.5

0.60

0.60

0.60

2.4

501.7

0.40

0.40

0.40

-

514.5

2.00

2.00

2.00

8.0

528.7

0.35

0.35

0.35

1.0

ML VIS

5.0

5.0

5.0

20.0

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Last modified: March 21, 2013