Coherent Innova 300 FreD Deep UV Source

In applications requiring deep-UV, the qualities of the output beam are of the utmost importance. FreD lasers exhibit exceptional spatial and temporal coherence, wavelength stability, and output power stability. These factors make the FreD system the ideal laser for exacting applications requiring precise process control.

FreD systems combine an extremely stable continuous SuperInvar resonator with performance-enhancing active stabilization components such as PowerTrack, ModeTrack, and ModeTune. These features ensure the highest performance over extended time periods. Each FreD system utilizes the Series V plasma tube, which delivers the longest lifetime and cost-effective operation. Push-button remote operation is standard, with Sabre MotoFreD's "Search-And-Tune" function also offering automatic fundamental wavelength selection and peaking.

Innova FreD Key Features:

• SuperInvar Resonator for superb beam pointing
• Innova Series V plasma tube for long troublefree lifetime
• Intelligent system control and LCD remote
• PowerTrack active cavity stabilization assures lowest noise, best transverse mode, and highest stability
• ModeTrack/ModeTune active etalon stabilization for mode-hop-free single-frequency performance over a wide temperature range
• Sentry System provides hands-off operation via Search-and-Tune and Automatic Mode Control
• Integral Heat Exchanger ensures superior cooling temperature control for enhanced stability

Innova FreD Key Power Specifications (All Powers in Watts)

 

(nm)	90C FreD	300C FreD/MotoFreD	300C FreD/MotoFreD High Power	Sabre MotoFreD
264.3	0.02	0.02	0.02	0.10
257.2	0.10	0.10	0.20	1.00
250.8	0.015	0.015	0.03	-
248.2	0.06	0.06	0.075	0.30
244.0	0.10	0.10	0.125	0.50
238.2	0.03	0.03	0.04	0.10
229.0	0.01	0.01	0.015	0.04
351.1	-	0.14	0.14	1.0
363.8	-	0.14	0.14	1.0
ML UV	0.40	0.40	0.40	3.0
457.9	0.35	0.35	0.35	1.2
476.5	0.60	0.60	0.60	2.0
488.0	1.50	1.50	1.50	6.5
496.5	0.60	0.60	0.60	2.4
501.7	0.40	0.40	0.40	-
514.5	2.00	2.00	2.00	8.0
528.7	0.35	0.35	0.35	1.0
ML VIS	5.0	5.0	5.0	20.0